Elevated temperature oxidation causes deterioration of materials in boiler, gas turbine and other power generating units. Alloys and super alloys are employed due to higher mechanical properties and creep resistance. The comparative analysis of alloys and super alloys were done and find that super alloys are high susceptible at higher temperature oxidation. The elevated temperature oxidation behavior of alloys and super alloys have been estimated by exposing the specimens at 800°C for 50 cycles, heating 60 Minuets followed by one-third cooling in every cycle at ambient condition. The formed oxides were analyzed with XRD and microstructure was studied with SEM for varied oxidation period. The weight change process was applied to know the total mass gain/loss in oxidation of alloys sample and find that super alloys fallowed the parabolic rate law. Finally, an oxidation mechanism that is the main cause of faster degradation under high temperature was established base on results obtained with various alloys and super alloys analysis.